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EUV Lithography Makes Good Progress, Still Not Ready for Prime Time
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EUV Lithography Makes Good Progress, Still Not Ready for Prime Time
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11th March 2016, 08:32
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| [M] Reviewer  Join Date: May 2010 Location: Romania
Posts: 148,678
 |  EUV Lithography Makes Good Progress, Still Not Ready for Prime Time At the recent annual SPIE Advanced Lithography conference, Intel, TSMC and other leading semiconductor companies said that significant strides have been made in extreme ultraviolet lithography (EUVL) over the past year or so. Intel did not reveal when exactly it plans to start using EUV technology, but indicated that it will clearly utilize it once it is suitable for high-volume production of semiconductors and is enough cost effective. Samsung and TSMC also intend to start inserting EUVL tools into production in the coming years. http://www.anandtech.com/show/10097/...for-prime-time |
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