Globalfoundries improves EUV yield
 

Migration to EUV lithography going well

Globalfoundries has improved its extreme ultraviolet (EUV) mask yield rate to nearly 65 percent and to make progress in its movement to EUV lithography.

Company CTO Gary Patton told the assembled throngs at a Shanghai company shin-dig that chipmakers were finding EUV lithography mask defects in the development of EUV-based process technologies.

http://fudzilla.com/news/processors/...oves-euv-yield