After 22nm Intel goes to 15nm
 

Last week at IDF, Intel did mention that they're aiming at 15nm after 22nm. Global foundries, AMD’s only CPU manufacturing hope is also planning to transition to production of 22nm chips in 2012 whereas probably two years later, they plan to go after 15nm.

Intel didn’t mention at IDF that 15 or 16nm, how some scientist call this process, is still under development and that not even the manufacturing tools are ready, but it all indicates that it should be ready by late 2013.

http://www.fudzilla.com/content/view/15719/35/